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MEMS Devices and Systems

Mechanical Engineering > MENG Technical Electives Courses > MEMS Devices and Systems
Course ID:
MENG 430

Program:
Mechanical Engineering

Level:
Undergraduate

Semester:
SPRING / 9

Credit:
3

Description

Introduction to MEMS technology, Benefits of Miniaturization, Fabrication technologies for MEMS (surface,
bulk micromachining, and LIGA). MEMS Material. Basic sensing and actuation principles. Microsystems
Design, MEMS packaging, assembly and testing. Clean Rooms and its instruments. Case study..